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Author:
Flowbudget
License:
Apache-2.0
Summary:
Open Source EUV Lithography Simulator — from plasma source to CD metrology
Latest version:
1.0.1
Required dependencies:
fastapi
|
gdstk
|
httpx
|
matplotlib
|
numpy
|
pydantic
|
scipy
|
torch
|
typer
|
uvicorn
Optional dependencies:
black
|
mypy
|
pytest
|
pytest-cov
|
ruff
|
sphinx
|
sphinx-rtd-theme
|
tomli
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